The Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education (LMMM) was established in 2006, and passed the acceptance check of the state in July, 2009. Using an interdisciplianry and innovative approach, the LMMM has focused our research on micro systems and microstructures, which covers four national key disciplines including Mechanical Manufacturing and Automation, Mechanical and Electronic Engineering, Materials Processing Engineering and Precision Instruments and Machinery, and other disciplines such as microelectronics and solid state physics, chemistry and physics etc. The main research areas consist of fundamental theory and method of micro- and nanomanufacturing,  |
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